金剛石薄膜的研究現狀和展望

金剛石薄膜的研究現狀和展望

金剛石薄膜的研究現狀和展望

摘要:  由于金剛石薄膜具有最高的硬度，最高的熱導率，高的絕緣性，高的光透過率，以及能耐酸、耐熱、耐輻射等優異性能，所以其能廣泛地應用于社會中的各領域。自人們使用化學氣相沉積（CVD）法在非金剛石的襯底上形成金剛石膜后，各國技術人員便都在不斷地深入研究CVD法合成金剛石薄膜的技術，以保證能達到低成本投入、高效益收入、多方面應用。本文介紹了金剛石薄膜的結構以及在這種結構下金剛石薄膜所具有的獨特性能，重點介紹了金剛石薄膜制備方法的進展以及金剛石薄膜在社會各領域的應用情況，并列出了國內外金剛石薄膜研究進展的差異，以反映出國內金剛石薄膜未來發展的方向，進而簡單論述了金剛石薄膜未來發展的趨勢。

關鍵字:  金剛石薄膜；化學氣相沉積CVD；制備及應用

Diamond thin film research present situation and forecast

Abstract:  Because diamond films have the highest hardness, the highest thermal conductivity, high insulation, high optical transmittance, and can also express excellent acid, heat and radiation resistance performance, so they can be widely used in various fields of the society. Since the use of chemical vapor deposition (CVD) method in the non-diamond substrates to fabricate diamond film, National technical staff will continue to have study CVD synthetic diamond film technology in-depth to ensure that input can achieve low-cost, high-income returns, many applications. This paper describes the structure of diamond films and the unique properties of this diamond films. In this paper, I focus on the introduction of diamond film preparation methods, the progress and the application of diamond thin films in all areas of society. In the end of the paper, the domestic diamond films progress is compared with foreign ones to reflect domestic diamond film direction for future development, and the future development of diamond film trend is briefly discussed.

Keywords:  Diamond thin film;  Chemical vapor deposition CVD;  Preparation and Application
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